Welded bellows for semiconductor chip processing equipment
Product parameter
| Specification | 14nm | 28nm |
|---|---|---|
| Application equipment | PVD heater Bellows | |
| Material | AM350 | HC276 |
| Outside diameter | 108 | |
| Inside diameter | 80 | |
| Service life | A million times | |
| Use environment | Inside vacuum/outside atmosphere | |
| Operating temperature | 350℃ | |
