Welded bellows for semiconductor chip processing equipment
Product parameter
| Specification | 7nm | 14nm |
|---|---|---|
| Application equipment | ETCH Shaft bwllows | |
| Material | AM350 | |
| Outside diameter | 350 | |
| Inside diameter | 50 | |
| Service life | Two million times | |
| Use environment | Inside vacuum/outside atmosphere | |
| Operating temperature | 350℃ | |
